A new series of angle encoders called the ERP 1000 with the design criteria of exceptionally high resolution, high speed, and high contamination resistance are now available through Dalatec Corporation. These new unique encoders are particularly useful for highly accurate measurement and positioning applications within semiconductor and metrology equipment.
The encoders are glass disk bonded to a hub and a scanning unit that scans the fine graduation on the surface of the disk, these ERP 1000s are offered with four different size disks and segments. The disks can have up to 63,000 lines with accuracy to +/- 0.9 arc seconds and up to 2600 RPM. A reference mark is included, and multiple scanning units could be used to increase accuracy even further.